Technical Paper: ASMC 2023

Authors:

Semya Elaoud, Dennis Xenos, and Tina O'Donnell

Abstract:

This work presents the deployment of a novel framework for fab-wide and toolset schedulers (FWS, TS) for scheduling large semiconductor manufacturing plants. We designed a hierarchical structure to enable a fab-wide lookahead guidance to parallel local toolset schedulers. The presented approach provides a better strategic management of factory assets and, deployed at Seagate Springtown, showed substantial cycle time improvements when compared to dispatch rules based methods.

Keywords:

Wafer fab scheduling, semiconductor manufacturing, real-time optimization.